![]() ![]() Isotopic analysis of a single element by SIMS is usually less troublesome. While SIMS is a very sensitive technique for qualitative analysis, a quantitative elementary analysis from secondary ions is often not possible due to the complex sputter and ionization processes and matrix related differences in secondary ion intensities. Time of flight-secondary ion mass spectrometry (ToF-SIMS) has become a very popular technique for obtaining well resolved elemental and isotopic maps in two or three dimensions,.
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